Concurrent Simulations of Plasma Reactors for VLSI Manufacturing

Rieffel, Marc A. (1995) Concurrent Simulations of Plasma Reactors for VLSI Manufacturing. Technical Report. California Institute of Technology. [CaltechCSTR:1995.cs-tr-95-12]

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EPrint Type:	Monograph (Technical Report)
Subjects:	All Records
ID Code:	241
Deposited By:	Caltech Library System
Deposited On:	14 May 2001
Record Number:	CaltechCSTR:1995.cs-tr-95-12
Official Persistent URL:	http://resolver.caltech.edu/CaltechCSTR:1995.cs-tr-95-12
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