The Design and Implementation of a Reticle Maker for VLSI

Gray, Moshe (1981) The Design and Implementation of a Reticle Maker for VLSI. Technical Report. California Institute of Technology. [CaltechCSTR:1981.4299-tr-81]

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Abstract

This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.

EPrint Type:	Monograph (Technical Report)
Subjects:	All Records
ID Code:	441
Deposited By:	Caltech Library System
Deposited On:	28 August 2002
Record Number:	CaltechCSTR:1981.4299-tr-81
Official Persistent URL:	http://resolver.caltech.edu/CaltechCSTR:1981.4299-tr-81
Usage Policy:	You are granted permission for individual, educational, research and non-commercial reproduction, distribution, display and performance of this work in any format.

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